Diffractometry and scatterometry : 24-28 May 1993, Warsaw, Poland

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Bibliographic Information

Title
"Diffractometry and scatterometry : 24-28 May 1993, Warsaw, Poland"
Statement of Responsibility
Maksymilian Pluta, Mariusz Szyjer, chairs/editors ; organized by SPIE Poland Chapter, Institute of Applied Optics, Warsaw ; sponsored by SPIE--the International Society for Optical Engineering, State Committee for Scientific Research (Poland)
Publisher
  • SPIE
Publication Year
  • c1994
Book size
28 cm

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Notes

Includes bibliographical references and index

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