Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.

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Bibliographic Information

Title
"Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A."
Statement of Responsibility
editors, T.F. Kuech, P.D. Dapkus, Y. Aoyagi
Publisher
  • Materials Research Society
Publication Year
  • c1991
Book size
24 cm

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Notes

Includes bibliographical references and index

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