Micro-electro-mechanical systems (MEMS) 1999 : presented at the 1999 International Mechanical Engineering Congress and Exposition, November 14-19, 1999, Nashville, Tennessee

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書誌事項

タイトル
"Micro-electro-mechanical systems (MEMS) 1999 : presented at the 1999 International Mechanical Engineering Congress and Exposition, November 14-19, 1999, Nashville, Tennessee"
責任表示
sponsored by the Fluids Engineering Division, ASME, the Electrical and Electronic Packaging Division, ASME, the Heat Transfer Division, ASME, the Bioengineering Division, ASME ; edited by Y. C. Lee ... [et al.]
出版者
  • American Society of Mechanical Engineers
出版年月
  • c1999
書籍サイズ
28 cm

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Includes bibliographical references and author index

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