Electron-beam technology in microelectronic fabrication

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Bibliographic Information

Title
"Electron-beam technology in microelectronic fabrication"
Statement of Responsibility
edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]
Publisher
  • Academic Press
Publication Year
  • 1980
Book size
24 cm

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Notes

Includes bibliographical references and index

Details 詳細情報について

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