Tungsten and other refractory metals for VLSI applications IV : proceedings of the 1988 workshop held October 4-6, 1988, Albuquerque, New Mexico, U.S.A.
CiNii
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Bibliographic Information
- Title
- "Tungsten and other refractory metals for VLSI applications IV : proceedings of the 1988 workshop held October 4-6, 1988, Albuquerque, New Mexico, U.S.A."
- Statement of Responsibility
- sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley and Sandia National Laboratories, Albuquerque, New Mexico ; editors, Robert S. Blewer, Carol M. McConica ; associate editors, Kie Y. Ahn ...[et al]
- Publisher
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- Materials Research Society
- Publication Year
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- c1989
- Book size
- 24 cm
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Notes
Includes bibliography and index
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Details 詳細情報について
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- CRID
- 1130000794378981120
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- NII Book ID
- BA07603380
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- ISBN
- 0931837987
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pittsburgh, Pa
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- Data Source
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- CiNii Books