VLSI planarization : methods, models, implementation

Name: VLSI planarization : methods, models, implementation
Author: Feĭnberg, V. Z. (Valeriĭ Zalmanovich), Levin, A., Rabinovich, E.

Web Site CiNii Available at 16 libraries

Bibliographic Information

Publisher

Publication Year

Includes bibliographical references and index

CRID

1130000794626149120
NII Book ID

BA31161868
ISBN

079234510X
LCCN

97008145
Web Site

https://lccn.loc.gov/97008145
Text Lang

en
Country Code

ne
Title Language Code

en
Place of Publication
- Dordrecht ; Boston
Classification
- LCC: TK7874.75
- DC21: 621.39/5
Subject
- LCSH: Integrated circuits -- Very large scale integration -- Design and construction
- LCSH: Integrated circuits -- Very large scale integration -- Mathematical models
Data Source
- CiNii Books