Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography : proceedings of the 8th Pfefferkorn Conference, held May 7-12, 1989, at Park City, Utah

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Bibliographic Information

Title
"Fundamental electron and ion beam interactions with solids for microscopy, microanalysis and microlithography : proceedings of the 8th Pfefferkorn Conference, held May 7-12, 1989, at Park City, Utah"
Statement of Responsibility
edited by Jørgen Schou, Pieter Kruit, Dale E. Newbury ; managing editors, Ram A. Sharma and Om Johari
Publisher
  • Scanning Microscopy International
Publication Year
  • c1990
Book size
29 cm

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Details 詳細情報について

  • CRID
    1130000794674514048
  • NII Book ID
    BA14040845
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Chicago (AMF O'Hare), Ill.
  • Data Source
    • CiNii Books
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