Silicon nitride in microelectronics and solar cells
Bibliographic Information
- Title
- "Silicon nitride in microelectronics and solar cells"
- Statement of Responsibility
- authors, Eberhard F. Krimmel, Rudolf Hezel ; editor, Alfred Pebler ; chief editor, Friedrich Schröder
- Publisher
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- Springer
- Publication Year
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- 1991
- Book size
- 26 cm
- Series Name / No
-
- : gw
- : us
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Notes
"Literature closing date: January 1990 in some cases more recent data have been considered"
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Details 詳細情報について
-
- CRID
- 1130000794749086720
-
- NII Book ID
- BA13156378
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- ISBN
- 3540936300
- 0387936300
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- LCCN
- 25001383
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- Text Lang
- en
-
- Country Code
- gw
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- Title Language Code
- en
-
- Place of Publication
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- Berlin ; Tokyo
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- Data Source
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- CiNii Books