Chemical vapor deposition of refractory metals and ceramics II : symposium held December 4-6, 1991, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Chemical vapor deposition of refractory metals and ceramics II : symposium held December 4-6, 1991, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Theodore M. Besmann, Bernard M. Gallois, James W. Warren
Publisher
  • Materials Research Society
Publication Year
  • c1992
Book size
24 cm

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Notes

Includes bibliographical references and indexes

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