Advanced Metallization Conference 2002 (AMC 2002) : proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan. This Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A.
CiNii
Available at 1 libraries
Bibliographic Information
- Title
- "Advanced Metallization Conference 2002 (AMC 2002) : proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan. This Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."
- Statement of Responsibility
- editors, Bradley M. Melnick ... [et al.]
- Publisher
-
- Materials Research Society
- Publication Year
-
- c2003
- Book size
- 24 cm
Search this Book/Journal
Notes
Includes bibliographical references and indexes
Other editors: Timothy S. Cale, Shigeaki Zaima, Tomohiro Ohta
- Tweet
Details 詳細情報について
-
- CRID
- 1130000794836141312
-
- NII Book ID
- BB1881203X
-
- ISBN
- 1558997199
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Warrendale, Pa.
-
- Subject
-
- LCSH: Semiconductors -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
- LCSH: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
- LCSH: Thin films -- Congresses
- LCSH: Metallic films -- Congresses
- LCSH: Metallizing -- Congresses
-
- Data Source
-
- CiNii Books