Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas

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Bibliographic Information

Title
"Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas"
Statement of Responsibility
Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1994
Book size
28 cm

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Notes

Includes bibliographical references and author index

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