Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
Bibliographic Information
- Title
- "Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas"
- Statement of Responsibility
- Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1994
- Book size
- 28 cm
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Notes
Includes bibliographical references and author index
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Details 詳細情報について
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- CRID
- 1130000794921008640
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- NII Book ID
- BA28173417
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- ISBN
- 0819416703
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- LCCN
- 94067263
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- Web Site
- https://lccn.loc.gov/94067263
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7871.85
- DC20: 621.3815/2/0287
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- Subject
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- LCSH: Semiconductors -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Design and construction -- Congresses
- LCSH: Semiconductors -- Testing -- Optical methods -- Congresses
- LCSH: Integrated circuits -- Testing -- Optical methods -- Congresses
- LCSH: Optical pattern recognition -- Congresses
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- Data Source
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- CiNii Books