Dry etching for VLSI

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Bibliographic Information

Title
"Dry etching for VLSI"
Statement of Responsibility
A.J. van Roosmalen, J.A.G. Baggerman, and S.J.H. Brader
Publisher
  • Plenum Press
Publication Year
  • c1991
Book size
26 cm

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Notes

Includes bibliographical references and index

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