Fundamental aspects of ultrathin dielectrics on si-based devices

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Bibliographic Information

Title
"Fundamental aspects of ultrathin dielectrics on si-based devices"
Statement of Responsibility
edited by Eric Garfunkel, Evgeni Gusev and Alexander Vul'
Publisher
  • Kluwer Academic Publishers
Publication Year
  • 1998
Book size
24 cm
Series Name / No
  • : pbk

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Notes

Includes index

"NATO Science Sereis"--Cover

"Published in cooperation with NATO Scientific Affairs Division."

Proceedings of the NATO Advanced Research Workshop onFundamental Aspects of Ultrathin Dielectrics on Si-Based Devices:Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997

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