Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France

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Bibliographic Information

Title
"Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France"
Statement of Responsibility
Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]
Publisher
  • SPIE
Publication Year
  • c2001
Book size
28 cm

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Notes

Includes bibliographic references and author index

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