Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
Bibliographic Information
- Title
- "Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France"
- Statement of Responsibility
- Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]
- Publisher
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- SPIE
- Publication Year
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- c2001
- Book size
- 28 cm
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Notes
Includes bibliographic references and author index
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Details 詳細情報について
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- CRID
- 1130000794964738688
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- NII Book ID
- BA80136947
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- ISBN
- 0819441090
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- LCCN
- 2002265434
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- Web Site
- https://lccn.loc.gov/2002265434
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Washington
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- Data Source
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- CiNii Books