Bibliographic Information
- Title
- "Technology of proximal probe lithography"
- Statement of Responsibility
- Christie R.K. Marrian, editor
- Publisher
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- SPIE Optical Engineering Press
- Publication Year
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- c1993
- Book size
- 26 cm
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Notes
Includes bibliographical references
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Details 詳細情報について
-
- CRID
- 1130000794993443072
-
- NII Book ID
- BA37527612
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- ISBN
- 0819412325
- 0819412333
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- LCCN
- 93008684
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- Web Site
- https://lccn.loc.gov/93008684
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- Text Lang
- en
-
- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Classification
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- LCC: TK7874.8
- DC20: 621.3815/31
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- Subject
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- LCSH: Molecular electronics
- LCSH: Lithography, Electron beam
- LCSH: Probes (Electronic instruments)
- LCSH: Nanotechnology
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- Data Source
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- CiNii Books