Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Bibliographic Information
- Title
- "Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology"
- Statement of Responsibility
- editors, G. R. Srinivasan, C. S. Murthy, S. T. Dunham ; [sponsored by] Electronics Division
- Publisher
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- Electrochemical Society
- Publication Year
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- c1996
- Book size
- 23 cm
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Notes
"held in Los Angeles, California, May 5-10, 1996, as part of the Spring Meeting of the Electrochemical Society."
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Details 詳細情報について
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- CRID
- 1130000795048103808
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- NII Book ID
- BA28548360
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- ISBN
- 1566771544
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- LCCN
- 95083752
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- Web Site
- https://lccn.loc.gov/95083752
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books