Silicon processing for the VLSI era

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Bibliographic Information

Title
"Silicon processing for the VLSI era"
Statement of Responsibility
Stanley Wolf
Publisher
  • Lattice Press
Publication Year
  • c1986-<c1990 >
Book size
25 cm
Series Name / No
  • cover : v. 1
  • v. 2

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Notes

vol. 1: Process technology. vol. 2: Process integration

Includes bibliographies and indexes

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