Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Richard B. Fair, Charles W. Pearce, Jack Washburn
Publisher
  • Materials Research Society
Publication Year
  • c1985
Book size
24 cm

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Notes

"Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Material's Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments

Includes bibliographies and indexes

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