Principles and applications of NanoMEMS physics

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Bibliographic Information

Title
"Principles and applications of NanoMEMS physics"
Statement of Responsibility
by Héctor J. De Los Santos
Publisher
  • Springer
Publication Year
  • c2005
Book size
25 cm
Series Name / No
  • : hb

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Notes

Includes bibliographical references (p. [241]-252) and index

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