Fundamentals of microfabrication and nanotechnology
Bibliographic Information
- Title
- "Fundamentals of microfabrication and nanotechnology"
- Statement of Responsibility
- Marc J. Madou
- Publisher
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- CRC Press
- 3rd ed
- Publication Year
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- c2012
- Book size
- 29 cm
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Details 詳細情報について
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- CRID
- 1130000795464954240
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- NII Book ID
- BB06582045
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- ISBN
- 9780849331800
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Boca Raton
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- Data Source
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- CiNii Books