Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, R.P.H. Chang, B. Abeles
Publisher
  • Materials Research Society
Publication Year
  • c1985
Book size
24 cm

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Notes

Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984

Includes bibliographies and indexes

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