Bibliographic Information
- Title
- "Microlithography"
- Publisher
-
- SPIE Optical Engineering Press
- Institution of Electrical Engineers
- Publication Year
-
- c1997
- Book size
- 26 cm
- Series Name / No
-
- : us
- : uk
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Notes
"SPIE press monograph PM39"
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130000795526091520
-
- NII Book ID
- BA31844102
-
- ISBN
- 9780819423788
- 0852969066
-
- LCCN
- 96040237
-
- Web Site
- https://lccn.loc.gov/96040237
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Bellingham, Wash.
- London
-
- Subject
-
- LCSH: Microlithography
- LCSH: Micromachining
- LCSH: Microfabrication
-
- Data Source
-
- CiNii Books
