Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland March 1998

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Bibliographic Information

Title
"Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland March 1998"
Statement of Responsibility
editors David G. Seiler ... [et al.]
Publisher
  • American Institute of Physics
Publication Year
  • c1998
Book size
28 cm
Series Name / No
  • set
  • print
  • CD-ROM

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Notes

Includes bibliographical references and index

"DOE CONF-980364"--T.p. verso

"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998."-pref.

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Details 詳細情報について

  • CRID
    1130000795534334464
  • NII Book ID
    BA40663222
  • ISBN
    1563967537
    1563968673
    1563968681
  • LCCN
    98087959
  • Web Site
    https://lccn.loc.gov/98087959
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • New York
  • Data Source
    • CiNii Books
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