Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991
CiNii
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Bibliographic Information
- Title
- "Gettering and deffect engineering in semiconductor technology : GADEST '91 : proceedings of the 4th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 13-19 1991"
- Statement of Responsibility
- editors, M. Kittler and H. Richter
- Publisher
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- Sci-Tech Publications
- Publication Year
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- 1991
- Book size
- 25 cm
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Details 詳細情報について
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- CRID
- 1130000795579228800
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- NII Book ID
- BA13437989
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- Text Lang
- en
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- Country Code
- lh
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- Title Language Code
- en
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- Place of Publication
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- Vaduz
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- Data Source
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- CiNii Books