Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Name: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Author: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Bibyk, Steven B., Electrochemical Society. Dielectrics and Insulation Division, Electrochemical Society. Electronics Division, Electrochemical Society. High Temperature Materials Division

Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Bibyk, Steven B., Electrochemical Society. Dielectrics and Insulation Division, Electrochemical Society. Electronics Division, Electrochemical Society. High Temperature Materials Division

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Bibyk, Steven B.
Electrochemical Society. Dielectrics and Insulation Division
Electrochemical Society. Electronics Division
Electrochemical Society. High Temperature Materials Division

Bibliographic Information

Title: "Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films"

Statement of Responsibility: edited by Steven B. Bibyk ... [et al.] ; Dielectrics and Insulation, and Electronics, and High Temperature Materials Divisions

Publisher

Electrochemical Society

Publication Year

c1989

Book size: 23 cm

Other Title

Silicon nitride and silicon dioxide thin insulating films

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Notes

Includes bibliographical references

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