Proceedings of the Symposium on Interconnect and Contact Metallization
Bibliographic Information
- Title
- "Proceedings of the Symposium on Interconnect and Contact Metallization"
- Statement of Responsibility
- editor, Hazara S. Rathore ... [et al.]
- Publisher
-
- Electrochemical Society
- Publication Year
-
- c1998
- Book size
- 23 cm
- Other Title
-
- Interconnect and contact metallization
Search this Book/Journal
Notes
"Dielectric Science and Technology, Electronics, and Electrodeposition divisions."
Includes bibliographical references and index
- Tweet
Details 詳細情報について
-
- CRID
- 1130000795723860736
-
- NII Book ID
- BA4316326X
-
- ISBN
- 1566771846
-
- LCCN
- 98203944
-
- Web Site
- https://lccn.loc.gov/98203944
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Pennington, NJ
-
- Subject
-
- LCSH: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
- LCSH: Electrochemical metallizing -- Congresses
- LCSH: Plasma-enhanced chemical vapor deposition -- Congresses
- LCSH: Dielectrics -- Congresses
-
- Data Source
-
- CiNii Books