Proceedings of the Symposium on Interconnect and Contact Metallization
Bibliographic Information
- Title
- "Proceedings of the Symposium on Interconnect and Contact Metallization"
- Statement of Responsibility
- editor, Hazara S. Rathore ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c1998
- Book size
- 23 cm
- Other Title
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- Interconnect and contact metallization
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Notes
"Dielectric Science and Technology, Electronics, and Electrodeposition divisions."
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130000795723860736
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- NII Book ID
- BA4316326X
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- ISBN
- 1566771846
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- LCCN
- 98203944
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- Web Site
- https://lccn.loc.gov/98203944
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Subject
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- LCSH: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
- LCSH: Electrochemical metallizing -- Congresses
- LCSH: Plasma-enhanced chemical vapor deposition -- Congresses
- LCSH: Dielectrics -- Congresses
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- Data Source
-
- CiNii Books
