Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California

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Bibliographic Information

Title
"Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California"
Statement of Responsibility
John C. Stover, chair/editor
Publisher
  • SPIE
Publication Year
  • c1999
Book size
28 cm

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Notes

Includes bibliographical references and index

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