Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California

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Bibliographic Information

Title
"Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California"
Statement of Responsibility
Scott A. MacDonald, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
  • International Society for Optical Engineering
Publication Year
  • 1988
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographies and index

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