Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California

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Bibliographic Information

Title
"Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California"
Statement of Responsibility
Richard B. Hoover, Arthur B.C. Walker, chairs/editors
Publisher
  • SPIE
Publication Year
  • c1993
Book size
28 cm
Series Name / No
  • : pbk

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Notes

Includes bibliographical references and index

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