Growth and transport in nanostructured materials : reactive transport in PVD, CVD, and ALD

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Bibliographic Information

Title
"Growth and transport in nanostructured materials : reactive transport in PVD, CVD, and ALD"
Statement of Responsibility
Angel Yanguas-Gil
Publisher
  • Springer
Publication Year
  • [2017]
Book size
24 cm
Series Name / No
  • pbk.

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Details 詳細情報について

  • CRID
    1130000795855346304
  • NII Book ID
    BB23829042
  • ISBN
    9783319246703
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Cham
  • Classification
  • Data Source
    • CiNii Books
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