Proceedings of the Fifth Symposium on Automated Integrated Circuits Manufacturing

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Bibliographic Information

Title
"Proceedings of the Fifth Symposium on Automated Integrated Circuits Manufacturing"
Statement of Responsibility
edited by Vaughn Akins
Publisher
  • Electrochemical Society
Publication Year
  • c1990
Book size
23 cm

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Details 詳細情報について

  • CRID
    1130000795861549440
  • NII Book ID
    BA11132561
  • LCCN
    90080580
  • Web Site
    https://lccn.loc.gov/90080580
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ (10 S. Main St., Pennington 08534-2896)
  • Classification
  • Data Source
    • CiNii Books
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