Bibliographic Information
- Title
- "MEMS : introduction and fundamentals"
- Statement of Responsibility
- edited by Mohamed Gad-el-Hak
- Publisher
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- CRC, Taylor & Francis
- Publication Year
-
- 2006
- Book size
- 26 cm
- Series Name / No
-
- : hardcover
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Notes
The MEMS handbook, 2nd ed
"A CRC Press book"--Back cover
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130000795936146304
-
- NII Book ID
- BA75369742
-
- ISBN
- 0849391377
-
- LCCN
- 2005050111
-
- Web Site
- https://lccn.loc.gov/2005050111
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Boca Raton, Fla.
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- Subject
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- LCSH: Microelectromechanical systems
- LCSH: Microelectronics
- LCSH: Nanotechnology
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- Data Source
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- CiNii Books