Microelectronic materials and processes

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Bibliographic Information

Title
"Microelectronic materials and processes"
Statement of Responsibility
edited by R.A. Levy
Publisher
  • Kluwer Academic
Publication Year
  • 1989
Book size
25 cm
Series Name / No
  • : hbk
  • : pbk

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Notes

Includes index

Proceedings of the NATO Advanced Study Institute on Microelectronic Materials and Processes II Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986

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