Fundamental electron interactions with plasma processing gases

Web Site CiNii Available at 7 libraries

Bibliographic Information

Title
"Fundamental electron interactions with plasma processing gases"
Statement of Responsibility
Loucas G. Christophorou and James K. Olthoff
Publisher
  • Kluwer Academic/Plenum Publishers
Publication Year
  • c2004
Book size
26 cm

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

Back to top