Electroceramic-based MEMS : fabrication-technology and applications

Web Site CiNii Available at 2 libraries

Bibliographic Information

Title
"Electroceramic-based MEMS : fabrication-technology and applications"
Statement of Responsibility
edited by Nava Setter
Publisher
  • Springer Science+Business Media
Publication Year
  • c2005
Book size
25 cm

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

Back to top