Characterization and metrology for ULSI technology 2005, Richardson, Texas 15-18 March 2005

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Bibliographic Information

Title
"Characterization and metrology for ULSI technology 2005, Richardson, Texas 15-18 March 2005"
Statement of Responsibility
editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].
Publisher
  • American Institute of Physics
Publication Year
  • c2005
Book size
28 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000796035803776
  • NII Book ID
    BA75161355
  • ISBN
    0735402779
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Melville, N. Y.
  • Data Source
    • CiNii Books
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