Proceedings of the Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors

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Bibliographic Information

Title
"Proceedings of the Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors"
Statement of Responsibility
edited by S.J. Pearton, K.S. Jones, V.J. Kapoor ; [sponsored by the] Electronics and Dielectric Science and Technology divisions
Publisher
  • Electrochemical Society
Publication Year
  • c1990
Book size
23 cm
Other Title
  • Ion implantation and dielectrics for elemental and compound semiconductors

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Notes

Includes bibliographical references and indexes

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