Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

Name: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium
Author: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Sundaram, K. B., Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. High Temperature Materials Division

Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Sundaram, K. B., Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. High Temperature Materials Division

Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

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Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Sundaram, K. B.
Electrochemical Society. Dielectric Science and Technology Division
Electrochemical Society. Electronics Division
Electrochemical Society. High Temperature Materials Division

Bibliographic Information

Title: "Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium"

Statement of Responsibility: editors, K. B. Sundaram ... [et al.] ; Dielectric Science and Technology and Electronics Divisions, and High Temperature Materials Divisions [of the Electrochemical Society]

Publisher

Electrochemical Society

Publication Year

c1999

Book size: 23 cm

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Includes bibliographic references and indexes

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