Advanced semiconductor epitaxial growth processes and lateral and vertical fabrication : 23-26 March 1992, Somerset, New Jersey

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Bibliographic Information

Title
"Advanced semiconductor epitaxial growth processes and lateral and vertical fabrication : 23-26 March 1992, Somerset, New Jersey"
Statement of Responsibility
Roger J. Malik ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1992
Book size
28 cm

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Notes

Includes bibliographical references and index

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