Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia

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タイトル: "Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia"

責任表示: Paul D. Frnazon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization IEEE South Australia Section

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Includes bibliographic references and author index