Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA

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Bibliographic Information

Title
"Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA"
Statement of Responsibility
Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Publisher
  • SPIE
Publication Year
  • c2000
Book size
28 cm

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Notes

Includes bibliographical references and index

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