Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang
Publisher
  • Materials Research Society
Publication Year
  • c1992
Book size
24 cm

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Notes

Includes bibliographical references and index

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