Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California

CiNii Available at 2 libraries

Bibliographic Information

Title
"Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California"
Statement of Responsibility
chair/editor Will Conley ; sponsored and published by SPIE--the International Society for Optical Engineer
Publisher
  • SPIE
Publication Year
  • c1998
Book size
29 cm
Series Name / No
  • SET

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

  • CRID
    1130000796380945920
  • NII Book ID
    BA37525151
  • ISBN
    0819427780
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
Back to top