Rapid thermal and laser processing : 24-25 September 1992, San Jose, California
Bibliographic Information
- Title
- "Rapid thermal and laser processing : 24-25 September 1992, San Jose, California"
- Statement of Responsibility
- Dim-Lee Kwong, Heinrich G. Müller, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1993
- Book size
- 28 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000796472041856
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- NII Book ID
- BA26606499
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- ISBN
- 0819410020
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- LCCN
- 92062655
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- Web Site
- https://lccn.loc.gov/92062655
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7871.85
- DC20: 621.3815/2
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- Subject
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- LCSH: Semiconductors -- Heat treatment -- Congresses
- LCSH: Semiconductor doping -- Congresses
- LCSH: Semiconductor industry -- Laser use in -- Congresses
- LCSH: Plasma-enhanced chemical vapor deposition -- Congresses
- LCSH: Multichip modules (Microelectronics) -- Design and construction -- Congresses
- LCSH: Rapid thermal processing -- Congresses
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- Data Source
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- CiNii Books