Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California
Bibliographic Information
- Title
- "Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California"
- Statement of Responsibility
- chairman/editor: Harry L. Stover
- Publisher
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- S.P.I.E.-- International Society for Optical Engineering
- Publication Year
-
- c1984
- Book size
- 28 cm
- Series Name / No
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- pbk.
- Other Title
-
- Optical microlithography 3
- Optical microlithography three
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Notes
Includes bibliographies and index
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Details 詳細情報について
-
- CRID
- 1130000796476811648
-
- NII Book ID
- BA23981560
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- ISBN
- 0892525053
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- LCCN
- 84050822
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- Web Site
- https://lccn.loc.gov/84050822
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- Text Lang
- en
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- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Bellingham, Wash., USA
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- Classification
-
- LCC: TR940
- DC19: 621.381/74
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- Data Source
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- CiNii Books