Microfabricated Systems and MEMS V : proceedings of the International Symposium
Bibliographic Information
- Title
- "Microfabricated Systems and MEMS V : proceedings of the International Symposium"
- Statement of Responsibility
- editors, P.J. Hesketh ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c2000
- Book size
- 24 cm
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Notes
"Sensor, Dielectric Science & Technology, and Electronics Divisions"--on T.p
"... held in Phoenix, October 2000. This symposium has had a name change to represent the diversity of subject matter involved in the conference sessions"--on pref
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130000796783178240
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- NII Book ID
- BA54507280
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- ISBN
- 1566772869
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- LCCN
- 00107659
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- Web Site
- https://lccn.loc.gov/00107659
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, N.J.
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- Subject
-
- Data Source
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- CiNii Books
