Morphological evolution of electrodeposits -and- electrochemical processing in ULSI fabrication and electrodeposition of and on semiconductors IV : proceedings of the international symposia

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Bibliographic Information

Title
"Morphological evolution of electrodeposits -and- electrochemical processing in ULSI fabrication and electrodeposition of and on semiconductors IV : proceedings of the international symposia"
Statement of Responsibility
editors, K. Kondo ... [et al.] ; sponsoring divisions, Electrodeposition, Dielectric Science and Technology, Electronics
Publisher
  • Electrochemical Society
Publication Year
  • c2005
Book size
24 cm

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Notes

"...were held during the 2001 Spring Meeting of the Electrochemical Soeity in Washington, D. C., the 198th meeting"--on pref.

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000796801427840
  • NII Book ID
    BA73943199
  • LCCN
    2004112427
  • Web Site
    https://lccn.loc.gov/2004112427
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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