Proceedings of the Ninth Symposium on Plasma Processing

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Bibliographic Information

Title
"Proceedings of the Ninth Symposium on Plasma Processing"
Statement of Responsibility
edited by G.S. Mathad, D.W. Hess
Publisher
  • Electrochemical Society
Publication Year
  • c1992
Book size
23 cm
Other Title
  • Plasma processing

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Notes

"Dielectric Science and Technology and Electronics Divisions."

Spine title: Plasma processing

Includes bibliographical references and indexes

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