Micromachining and micropackaging of transducers

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Bibliographic Information

Title
"Micromachining and micropackaging of transducers"
Statement of Responsibility
Clifford D. Fung ... [et al.]
Publisher
  • Elsevier
Publication Year
  • 1985
Book size
25 cm

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Notes

Papers from the Workshop on Micromachining and Micropackaging of Transducers, organized by the faculty associated with the Semiconductor Chemical Transducer Resource at Case Western Reserve University, on Nov. 7-9, 1984

Includes bibliographies

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