A laser scanner for semiconductor devices
Bibliographic Information
- Title
- "A laser scanner for semiconductor devices"
- Statement of Responsibility
- David E. Sawyer and David W. Berning
- Publisher
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- U.S. G.P.O.
- Publication Year
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- 1977
- Book size
- 26 cm
- Volume(Year)
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- 400-24
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Details 詳細情報について
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- CRID
- 1130000797079683712
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- NII Book ID
- BB18576753
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- LCCN
- 76608408
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Washington
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- Classification
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- LCC: QC100
- LCC: TK7882.S3
- DC: 602/.1 s
- DC: 621.3815/48
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- Subject
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- LCSH: Optical scanners
- LCSH: Semiconductor industry -- Laser use in
- LCSH: Semiconductors -- Testing
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- Data Source
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- CiNii Books